Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness

标题
Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 32, Issue 1, Pages 01A130
出版商
American Vacuum Society
发表日期
2013-12-28
DOI
10.1116/1.4850176

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