Stable ZnO thin film transistors by fast open air atomic layer deposition

标题
Stable ZnO thin film transistors by fast open air atomic layer deposition
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 92, Issue 19, Pages 192101
出版商
AIP Publishing
发表日期
2008-05-14
DOI
10.1063/1.2924768

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