Low-Temperature Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3 Thin Films

标题
Low-Temperature Roll-to-Roll Atmospheric Atomic Layer Deposition of Al2O3 Thin Films
作者
关键词
-
出版物
LANGMUIR
Volume 30, Issue 47, Pages 14195-14203
出版商
American Chemical Society (ACS)
发表日期
2014-11-19
DOI
10.1021/la503406v

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