Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition

标题
Mechanistic modeling study on process optimization and precursor utilization with atmospheric spatial atomic layer deposition
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 1, Pages 01A108
出版商
American Vacuum Society
发表日期
2015-10-07
DOI
10.1116/1.4932564

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