标题
Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 121, Issue 17, Pages 171101
出版商
AIP Publishing
发表日期
2017-03-22
DOI
10.1063/1.4978350
参考文献
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