Magnetron sputter deposition: Linking discharge voltage with target properties

标题
Magnetron sputter deposition: Linking discharge voltage with target properties
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 9, Pages 2825-2839
出版商
Elsevier BV
发表日期
2008-11-22
DOI
10.1016/j.tsf.2008.11.108

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