Surface characteristics for the Ti Al N coatings deposited by high power impulse magnetron sputtering technique at the different bias voltages

标题
Surface characteristics for the Ti Al N coatings deposited by high power impulse magnetron sputtering technique at the different bias voltages
作者
关键词
Nanostructured TiAlN coatings, HIPIMS, Bias voltage, Tribological properties, Mechanical properties
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 688, Issue -, Pages 820-827
出版商
Elsevier BV
发表日期
2016-07-13
DOI
10.1016/j.jallcom.2016.07.013

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