Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time- and space-resolved optical emission spectroscopy and fast imaging

Evolution of the plasma composition of a high power impulse magnetron sputtering system studied with a time-of-flight spectrometer

(2009) Efim Oks et al.   JOURNAL OF APPLIED PHYSICS

Study of a HPPMS discharge in Ar/O2mixture: II. Plasma optical emission and deposited RuOxfilm properties

(2009) D Benzeggouta et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Study of a HPPMS discharge in Ar/O2mixture: I. Discharge characteristics with Ru cathode

(2009) D Benzeggouta et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Observation of Ti4+ ions in a high power impulse magnetron sputtering plasma

(2008) Joakim Andersson et al.   APPLIED PHYSICS LETTERS

Gasless sputtering: Opportunities for ultraclean metallization, coatings in space, and propulsion

(2008) Joakim Andersson et al.   APPLIED PHYSICS LETTERS

Self-sputtering runaway in high power impulse magnetron sputtering: The role of secondary electrons and multiply charged metal ions

(2008) André Anders   APPLIED PHYSICS LETTERS

Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges

(2008) P Kudláček et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport

(2008) P Vašina et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY

Cross-field ion transport during high power impulse magnetron sputtering

(2008) Daniel Lundin et al.   PLASMA SOURCES SCIENCE & TECHNOLOGY