Selection of metal ion irradiation for controlling Ti1−xAlxN alloy growth via hybrid HIPIMS/magnetron co-sputtering

标题
Selection of metal ion irradiation for controlling Ti1−xAlxN alloy growth via hybrid HIPIMS/magnetron co-sputtering
作者
关键词
-
出版物
VACUUM
Volume 86, Issue 8, Pages 1036-1040
出版商
Elsevier BV
发表日期
2011-11-08
DOI
10.1016/j.vacuum.2011.10.027

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