High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering

标题
High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 10, Pages 3226-3234
出版商
Elsevier BV
发表日期
2010-11-25
DOI
10.1016/j.surfcoat.2010.11.039

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