Growth of Aluminum Molybdenum Oxide Films by Atomic Layer Deposition with Using Trimethylaluminum, Molybdenum Oxytetrachloride, and Water

Al2O3/MoOx Hole-Selective Passivating Contact for Silicon Heterojunction Solar Cell

(2022) Sanchari Chowdhury et al.   ECS Journal of Solid State Science and Technology

Atomic Layer Deposition and Thermal Transformations of Aluminum-Vanadium Oxide Thin Films

(2022) A. I. Abdulagatov et al.   RUSSIAN JOURNAL OF GENERAL CHEMISTRY

Studying the Atomic Layer Deposition of Molybdenum Oxide and Titanium–Molybdenum Oxide Films Using Quartz Crystal Microbalance

(2022) A. M. Maksumova et al.   Russian Journal of Physical Chemistry A

Thermal atomic layer etching of germanium-rich SiGe using an oxidation and “conversion-etch” mechanism

(2021) Aziz I. Abdulagatov et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al2O3 by trimethylaluminum

(2021) Tyler J. Myers et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Fabrication of Multi-Layer Metal Oxides Structure for Colored Glass

(2021) Akpeko Gasonoo et al.   Materials

Aluminum Oxide Passivating Tunneling Interlayers for Molybdenum Oxide Hole-Selective Contacts

(2020) Benjamin E. Davis et al.   IEEE Journal of Photovoltaics

Interface State Reduction by Plasma-Enhanced Atomic Layer Deposition of Homogeneous Ternary Oxides

(2020) Steven A. Vitale et al.   ACS Applied Materials & Interfaces

Atomic layer deposition of amorphous tin-gallium oxide films

(2019) Fredrik Larsson et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition of functional multicomponent oxides

(2019) Mariona Coll et al.   APL Materials

Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review

(2018) Adriaan J. M. Mackus et al.   CHEMISTRY OF MATERIALS

Volatile Hexavalent Oxo-amidinate Complexes: Molybdenum and Tungsten Precursors for Atomic Layer Deposition

(2016) Aidan R. Mouat et al.   CHEMISTRY OF MATERIALS

Vapor deposition of molybdenum oxide using bis(ethylbenzene) molybdenum and water

(2016) Tasha L. Drake et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma

(2016) Martijn F. J. Vos et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Generalized molybdenum oxide surface chemical state XPS determination via informed amorphous sample model

(2015) Jonas Baltrusaitis et al.   APPLIED SURFACE SCIENCE

Review on Atomic Layer Deposition and Applications of Oxide Thin Films

(2013) Joice Sophia Ponraj et al.   CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES

Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges

(2011) H. B. Profijt et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Growth of thin films of molybdenum oxide by atomic layer deposition

(2010) Madeleine Diskus et al.   JOURNAL OF MATERIALS CHEMISTRY

Quartz Crystal Microbalance Studies of Al2O3Atomic Layer Deposition Using Trimethylaluminum and Water at 125 °C†

(2009) R. A. Wind et al.   JOURNAL OF PHYSICAL CHEMISTRY A

Passivation of Ge(100)∕GeO[sub 2]∕high-κ Gate Stacks Using Thermal Oxide Treatments

(2007) F. Bellenger et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Gray–blue Al2O3–MoOx ceramic pigments: Crystal structure, colouring mechanism and performance

(2006) Michele Dondi et al.   DYES AND PIGMENTS