Atomic Layer Deposition and Thermal Transformations of Aluminum-Vanadium Oxide Thin Films
出版年份 2022 全文链接
标题
Atomic Layer Deposition and Thermal Transformations of Aluminum-Vanadium Oxide Thin Films
作者
关键词
-
出版物
RUSSIAN JOURNAL OF GENERAL CHEMISTRY
Volume 92, Issue 8, Pages 1498-1510
出版商
Pleiades Publishing Ltd
发表日期
2022-09-15
DOI
10.1134/s1070363222080187
参考文献
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