Growth of thin films of molybdenum oxide by atomic layer deposition - Peeref

标题

Growth of thin films of molybdenum oxide by atomic layer deposition

作者

关键词

-

出版物

JOURNAL OF MATERIALS CHEMISTRY

Volume 21, Issue 3, Pages 705-710

出版商

Royal Society of Chemistry (RSC)

发表日期

2010-11-01

DOI

10.1039/c0jm01099e

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