标题
Review on Atomic Layer Deposition and Applications of Oxide Thin Films
作者
关键词
-
出版物
CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES
Volume 38, Issue 3, Pages 203-233
出版商
Informa UK Limited
发表日期
2013-06-19
DOI
10.1080/10408436.2012.736886
参考文献
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