Influence of Nitrogen Seeding on the Electron and Ion Behaviors in Helicon Wave Excited Argon Plasma
出版年份 2023 全文链接
标题
Influence of Nitrogen Seeding on the Electron and Ion Behaviors in Helicon Wave Excited Argon Plasma
作者
关键词
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出版物
PLASMA CHEMISTRY AND PLASMA PROCESSING
Volume -, Issue -, Pages -
出版商
Springer Science and Business Media LLC
发表日期
2023-01-23
DOI
10.1007/s11090-023-10311-4
参考文献
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