Correlating metastable-atom density, reduced electric field, and electron energy distribution in the post-transient stage of a 1-Torr argon discharge

标题
Correlating metastable-atom density, reduced electric field, and electron energy distribution in the post-transient stage of a 1-Torr argon discharge
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 24, Issue 3, Pages 034009
出版商
IOP Publishing
发表日期
2015-06-06
DOI
10.1088/0963-0252/24/3/034009

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