Operation of a permanent-magnets- expanding plasma source connected to a large-volume diffusion chamber

标题
Operation of a permanent-magnets- expanding plasma source connected to a large-volume diffusion chamber
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 44, Issue 1, Pages 015204
出版商
IOP Publishing
发表日期
2010-12-10
DOI
10.1088/0022-3727/44/1/015204

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