Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 110, Issue 11, Pages 113303

出版商

AIP Publishing

发表日期

2011-12-06

DOI

10.1063/1.3664858

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