Influence of Nitrogen Seeding on the Electron and Ion Behaviors in Helicon Wave Excited Argon Plasma
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Title
Influence of Nitrogen Seeding on the Electron and Ion Behaviors in Helicon Wave Excited Argon Plasma
Authors
Keywords
-
Journal
PLASMA CHEMISTRY AND PLASMA PROCESSING
Volume -, Issue -, Pages -
Publisher
Springer Science and Business Media LLC
Online
2023-01-23
DOI
10.1007/s11090-023-10311-4
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