Molecular dynamics study of the effects of machining tool shape on the nanotribology and interfacial behavior of diamond-like coatings on silicon substrates

标题
Molecular dynamics study of the effects of machining tool shape on the nanotribology and interfacial behavior of diamond-like coatings on silicon substrates
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 755, Issue -, Pages 139348
出版商
Elsevier BV
发表日期
2022-06-17
DOI
10.1016/j.tsf.2022.139348

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