Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study

标题
Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study
作者
关键词
Diamond like carbon (DLC), Fe-doped DLC, N-doped DLC, Si-doped DLC
出版物
THIN SOLID FILMS
Volume 610, Issue -, Pages 42-47
出版商
Elsevier BV
发表日期
2016-05-04
DOI
10.1016/j.tsf.2016.04.048

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