Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering

标题
Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering
作者
关键词
TiN films, Magnetron sputtering, Thickness, Microstructure, Resistivity
出版物
CERAMICS INTERNATIONAL
Volume 42, Issue 2, Pages 2642-2647
出版商
Elsevier BV
发表日期
2015-10-25
DOI
10.1016/j.ceramint.2015.10.070

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