Modulation of the microstructure, optical, and electrical properties of HfYO gate dielectrics by annealing temperature

标题
Modulation of the microstructure, optical, and electrical properties of HfYO gate dielectrics by annealing temperature
作者
关键词
-
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 735, Issue -, Pages 1427-1434
出版商
Elsevier BV
发表日期
2017-11-24
DOI
10.1016/j.jallcom.2017.11.261

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