Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 86, Issue 7-9, Pages 1818-1821

出版商

Elsevier BV

发表日期

2009-03-18

DOI

10.1016/j.mee.2009.03.076

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