Reliability aspects of ferroelectric TiN/Hf0.5Zr0.5O2/Ge capacitors grown by plasma assisted atomic oxygen deposition
出版年份 2020 全文链接
标题
Reliability aspects of ferroelectric TiN/Hf0.5Zr0.5O2/Ge capacitors grown by plasma assisted atomic oxygen deposition
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 117, Issue 21, Pages 212905
出版商
AIP Publishing
发表日期
2020-11-24
DOI
10.1063/5.0029657
参考文献
相关参考文献
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