Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering

标题
Origin of Ferroelectric Phase in Undoped HfO 2 Films Deposited by Sputtering
作者
关键词
-
出版物
Advanced Materials Interfaces
Volume -, Issue -, Pages 1901528
出版商
Wiley
发表日期
2019-10-01
DOI
10.1002/admi.201901528

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