Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering

标题
Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 516, Issue 15, Pages 4977-4982
出版商
Elsevier BV
发表日期
2007-10-12
DOI
10.1016/j.tsf.2007.10.001

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