ALD of ZnO using diethylzinc as metal-precursor and oxygen as oxidizing agent

标题
ALD of ZnO using diethylzinc as metal-precursor and oxygen as oxidizing agent
作者
关键词
-
出版物
APPLIED SURFACE SCIENCE
Volume 257, Issue 23, Pages 10031-10035
出版商
Elsevier BV
发表日期
2011-07-06
DOI
10.1016/j.apsusc.2011.06.133

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