标题
Suspended micro/nano channel resonators: a review
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 30, Issue 4, Pages 043001
出版商
IOP Publishing
发表日期
2020-01-22
DOI
10.1088/1361-6439/ab6df1
参考文献
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