Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

出版年份 2018 全文链接

标题

作者

关键词

Suspended microchannel resonators, Microfluidic channels, Piezoelectricity, Resonance frequency, Quality factor, Micromechanical sensors

出版物

Volume 192, Issue -, Pages 83-87

出版商

Elsevier BV

发表日期

2018-02-12

DOI

10.1016/j.mee.2018.02.011

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