High resolution polymer coated strain sensors for in-liquid operation - Peeref

标题

High resolution polymer coated strain sensors for in-liquid operation

作者

关键词

Strain sensor, Polymer MEMS, Metallic gauges

出版物

MICROELECTRONIC ENGINEERING

Volume 191, Issue -, Pages 38-41

出版商

Elsevier BV

发表日期

2018-02-01

DOI

10.1016/j.mee.2018.01.020

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