Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry

A nanomechanical mass sensor with yoctogram resolution

(2012) J. Chaste et al.   Nature Nanotechnology

An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid

(2011) V. Agache et al.   LAB ON A CHIP

Suspended microchannel resonators with piezoresistive sensors

(2010) J. Lee et al.   LAB ON A CHIP

Fabrication of a Nanomechanical Mass Sensor Containing a Nanofluidic Channel

(2010) Robert A. Barton et al.   NANO LETTERS

Toward Attogram Mass Measurements in Solution with Suspended Nanochannel Resonators

(2010) Jungchul Lee et al.   NANO LETTERS

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

(2008) J. Verd et al.   IEEE ELECTRON DEVICE LETTERS