Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects
出版年份 2014 全文链接
标题
Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects
作者
关键词
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出版物
ECS Journal of Solid State Science and Technology
Volume 4, Issue 1, Pages N3029-N3047
出版商
The Electrochemical Society
发表日期
2014-10-15
DOI
10.1149/2.0051501jss
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