Intrinsic stress fracture energy measurements for PECVD thin films in the SiOxCyNz:H system

标题
Intrinsic stress fracture energy measurements for PECVD thin films in the SiOxCyNz:H system
作者
关键词
-
出版物
MICROELECTRONICS RELIABILITY
Volume 49, Issue 7, Pages 721-726
出版商
Elsevier BV
发表日期
2009-06-29
DOI
10.1016/j.microrel.2009.04.006

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