Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

标题
Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 6, Pages 1858-1867
出版商
Elsevier BV
发表日期
2008-07-25
DOI
10.1016/j.tsf.2008.07.014

向作者/读者发起求助以获取更多资源

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation