期刊
THIN SOLID FILMS
卷 519, 期 22, 页码 7895-7898出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2011.05.014
关键词
Amorphous silicon carbide; Plasma-enhanced chemical vapor deposition; Thermal conductivity; Sound velocity; Young's modulus; Picosecond ultrasonics; Time-domain thermoreflectance
类别
资金
- NSF [DMR-0906753]
We report ultrafast optical measurements of the thermal conductivity and longitudinal sound velocity for a-SiC:H thin films deposited by plasma enhanced chemical vapor deposition (PECVD). Porous and non-porous films with mass densities ranging from 1.0-2.5 g/cm(3) were obtained by intentionally varying the PECVD process conditions. The longitudinal sound velocities for these materials as determined by picosecond ultrasonics ranged from 2370 m/s to 10460 m/s, and the Young's modulus determined from the sound velocity measurements ranged from 5-200 GPa. Time domain thermoreflectance measurements determined the thermal conductivity to range from 0.0009 W/cmK to 0.042 W/cmK. (C) 2011 Elsevier B.V. All rights reserved.
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