Recent progress in metal-organic chemical vapor deposition of $\left( 000\bar{1} \right)$ N-polar group-III nitrides

标题
Recent progress in metal-organic chemical vapor deposition of $\left( 000\bar{1} \right)$ N-polar group-III nitrides
作者
关键词
-
出版物
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 29, Issue 11, Pages 113001
出版商
IOP Publishing
发表日期
2014-08-20
DOI
10.1088/0268-1242/29/11/113001

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