Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition

标题
Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition
作者
关键词
-
出版物
THIN SOLID FILMS
Volume 517, Issue 24, Pages 6794-6797
出版商
Elsevier BV
发表日期
2009-05-30
DOI
10.1016/j.tsf.2009.05.037

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