Electroplating to visualize defects in Al2O3 thin films grown using atomic layer deposition

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 517, Issue 11, Pages 3269-3272

出版商

Elsevier BV

发表日期

2009-01-11

DOI

10.1016/j.tsf.2008.12.052

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