Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3and Rapid SiO2Atomic Layer Deposition

标题
Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3and Rapid SiO2Atomic Layer Deposition
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 112, Issue 12, Pages 4573-4580
出版商
American Chemical Society (ACS)
发表日期
2008-03-05
DOI
10.1021/jp076866+

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