Critical tensile and compressive strains for cracking of Al2O3 films grown by atomic layer deposition

Thermo-mechanical properties of alumina films created using the atomic layer deposition technique

(2010) David C. Miller et al.   SENSORS AND ACTUATORS A-PHYSICAL

A hybrid encapsulation method for organic electronics

(2009) N. Kim et al.   APPLIED PHYSICS LETTERS

Reliable thin film encapsulation for organic light emitting diodes grown by low-temperature atomic layer deposition

(2009) J. Meyer et al.   APPLIED PHYSICS LETTERS

Atomic Layer Deposition: An Overview

(2009) Steven M. George   CHEMICAL REVIEWS

The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates

(2009) David C. Miller et al.   JOURNAL OF APPLIED PHYSICS

Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

(2009) P. F. Carcia et al.   JOURNAL OF APPLIED PHYSICS

Thin-film encapsulation of polymer-based bulk-heterojunction photovoltaic cells by atomic layer deposition

(2009) Chih-Yu Chang et al.   ORGANIC ELECTRONICS

Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition

(2009) Yadong Zhang et al.   THIN SOLID FILMS

Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3and Rapid SiO2Atomic Layer Deposition

(2008) Arrelaine A. Dameron et al.   Journal of Physical Chemistry C

Nanoindentation Investigation of HfO[sub 2] and Al[sub 2]O[sub 3] Films Grown by Atomic Layer Deposition

(2008) K. Tapily et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Protection of polymer from atomic-oxygen erosion using Al2O3 atomic layer deposition coatings

(2007) Russell Cooper et al.   THIN SOLID FILMS