Silicon surface passivation by atomic layer deposited Al2O3

标题
Silicon surface passivation by atomic layer deposited Al2O3
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 4, Pages 044903
出版商
AIP Publishing
发表日期
2008-08-27
DOI
10.1063/1.2963707

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