Remote Plasma ALD of Platinum and Platinum Oxide Films

标题
Remote Plasma ALD of Platinum and Platinum Oxide Films
作者
关键词
-
出版物
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 12, Issue 7, Pages G34
出版商
The Electrochemical Society
发表日期
2009-05-19
DOI
10.1149/1.3125876

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