Comparative study of a-IGZO TFTs with direct current and radio frequency sputtered channel layers

Title
Comparative study of a-IGZO TFTs with direct current and radio frequency sputtered channel layers
Authors
Keywords
-
Journal
Journal of the Society for Information Display
Volume 23, Issue 7, Pages 306-312
Publisher
Wiley
Online
2015-10-23
DOI
10.1002/jsid.388

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