Journal
ECS SOLID STATE LETTERS
Volume 2, Issue 4, Pages Q21-Q24Publisher
ELECTROCHEMICAL SOC INC
DOI: 10.1149/2.005304ssl
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Funding
- SMART Innovation Center, Singapore [ING11027-ENG]
- NSFC [61274086]
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An exposure of the back channel of an indium gallium zinc oxide (IGZO) thin film transistor (TFT) to ultraviolet (UV)-activated oxygen can effectively shift the threshold voltage (V-th) of the TFT. The V-th decreases linearly with the exposure time while the on-state current greatly increase with the exposure time. The exposure doesn't have a strong impact on other device parameters. The effect of the exposure on the V-th is attributed to the increase in the electron concentration of the channel layer as a result of the creation of oxygen vacancies by exposure. (C) 2013 The Electrochemical Society.
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