A high-sensitivity and quasi-linear capacitive sensor for nanomechanical testing applications

Published 2009 View Full Article

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Title
A high-sensitivity and quasi-linear capacitive sensor for nanomechanical testing applications
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 7, Pages 075003
Publisher
IOP Publishing
Online
2009-06-24
DOI
10.1088/0960-1317/19/7/075003
References
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