In Situ Electron Microscopy Mechanical Testing of Silicon Nanowires Using Electrostatically Actuated Tensile Stages

Published 2010 View Full Article

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Title
In Situ Electron Microscopy Mechanical Testing of Silicon Nanowires Using Electrostatically Actuated Tensile Stages
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 3, Pages 663-674
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-04-09
DOI
10.1109/jmems.2010.2044746

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