Thickness-dependent phase evolution and dielectric property of Hf0.5Zr0.5O2 thin films prepared with aqueous precursor

Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature

(2013) Min Hyuk Park et al.   APPLIED PHYSICS LETTERS

Ferroelectricity in Simple Binary ZrO2 and HfO2

(2012) Johannes Müller et al.   NANO LETTERS

Low-Energy Path to Dense HfO2Thin Films with Aqueous Precursor

(2011) Kai Jiang et al.   CHEMISTRY OF MATERIALS

Characteristics of Sol–Gel-Derived and Crystallized HfO2Thin Films Dependent on Sol Solution

(2011) Hirofumi Shimizu et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Development of hafnium based high-k materials—A review

(2011) J.H. Choi et al.   MATERIALS SCIENCE & ENGINEERING R-REPORTS

Increasing permittivity in HfZrO thin films by surface manipulation

(2009) T. S. Böscke et al.   APPLIED PHYSICS LETTERS

Size-dependent polymorphism in HfO2 nanotubes and nanoscale thin films

(2009) Michael Shandalov et al.   JOURNAL OF APPLIED PHYSICS

Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition

(2009) J. Müller et al.   MICROELECTRONIC ENGINEERING

Investigation of sol–gel derived HfO2 on 4H-SiC

(2007) Kang Ji Wang et al.   APPLIED SURFACE SCIENCE

Correlation between the method of preparation and the properties of the sol–gel HfO2 thin films

(2007) M. Zaharescu et al.   JOURNAL OF NON-CRYSTALLINE SOLIDS