Electrically Benign Dry-Etching Method for Rutile TiO[sub 2] Thin-Film Capacitors with Ru Electrodes

Published 2009 View Full Article

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Title
Electrically Benign Dry-Etching Method for Rutile TiO[sub 2] Thin-Film Capacitors with Ru Electrodes
Authors
Keywords
-
Journal
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 13, Issue 1, Pages G1
Publisher
The Electrochemical Society
Online
2009-11-12
DOI
10.1149/1.3247971
References
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