Electrically Benign Dry-Etching Method for Rutile TiO[sub 2] Thin-Film Capacitors with Ru Electrodes

标题
Electrically Benign Dry-Etching Method for Rutile TiO[sub 2] Thin-Film Capacitors with Ru Electrodes
作者
关键词
-
出版物
ELECTROCHEMICAL AND SOLID STATE LETTERS
Volume 13, Issue 1, Pages G1
出版商
The Electrochemical Society
发表日期
2009-11-12
DOI
10.1149/1.3247971

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